ASTM E1634-02(2007)

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Product Details

Published:

06/01/2007

Number of Pages:

3

File Size:

1 file , 140 KB

Redline File Size:

2 files , 270 KB

Note:

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