ASTM E986
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Standard Practice for Scanning Electron Microscope Beam Size Characterization
| Published by | Publication Date | Number of Pages |
| ASTM | 06/01/2017 | 3 |
ASTM E986 – Standard Practice for Scanning Electron Microscope Beam Size Characterization
1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors, some of which are electron beam voltage and current, lens aberrations, contrast in the specimen, and operator-instrument-material interaction. However, the resolution for any set of conditions is limited by the size of the electron beam. This size can be quantified through the measurement of an effective apparent edge sharpness for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces, for example, Y-deflection waveform generation, for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 50 000 × . Higher magnifications may be attempted, but difficulty in making precise measurements can be expected.
Product Details
- Published:
- 06/01/2017
- Number of Pages:
- 3
- File Size:
- 1 file , 120 KB
- Note:
- This product is unavailable in Russia, Ukraine, Belarus
